Description

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Configuration

For the Applications of GIXRD, XRR, HRXRD, Roching Curve, Stress, RapidRSM - D8 large cabinet and enclosure - 3 kW Generator with internal cooling unit - 220/380-230/400V 3p 50/60Hz, 6Kva - 10m power cable for 220/380-230/400V 3p 50/60H2, 6KVA - 4-axes motor driver board - Vertical goniometer - Tracks Theta-Theta, inc. Theta-Theta ring for vertical goniometer - Tube mount adapter incl. optical bench position for line focus optics Cu - Storage rack for optical components - Spacer for measurement height 258mm, primary beam path - Optical bench, secondary - Storage rack for channel-cut monochromators - Universal detector mount without slit - LynxEye XE holder 0 deg - Tube mount, one motorized and one manual degree of freedom - Accessory set for 2-bounce monochromator - Mount for primary rotary absorber or UBC -collimator, measurement height 258mm - Spacer for measurement height 258mm, secondary beam path - Spacer for universal detector mount, measurement height 258mm - Counter balances for D8 Theta-Theta, tube and detector circle, measurement circle >600mm - Ceramic tube, long fine focus, Cu, 2.2 kW - 2-bounce Monochromator -ACC2 (Ge004) - Goebel mirror for Cu, 60mm length, sealed - Mount for UBC collimator with Rotary -Absorber, affixed to track - Ni filter for Cu-Kß radiation, 0.02mm - Axial Soller - 2.5° -Soller Slit 2.5 deg for LynxEye XE - Cu absorber 0.1mm for the LYNXEYE XE detector - Diagonal slit 1mm - Micro mask 1mm diameter - UBC collimator, short, 2.0mm, for Goebel Mirror, Montel, or DAC - Plug-in slit 6mm - Plug-in slit 2mm - Plug-in slit 1.2mm - Plug-in slit 1mm - Plug-in slit 0.6mm - Plug-in slit 0.2mm - Plug-in slit 0.1mm - UMC 1516, motorized XYZ-Phi-Chi drives, Theta/Theta (5 free ports on E03 required) - 5" vacuum chuck, rotating, complete - Reference crystal Si( 111) for HRXRD - Reference crystal Si(001) for HRXRD - Spacer for measurement height 258mm, secondary beam path - PATHFINDERPlus with 2-bounce Ge(022), automated 1-fach Absorber and motorized slit (2 free ports on E03 required) - LYNXEYE-2 detector with 500 micrometer sensor and 0/90 deg mount - Computer, international version, international operating system - DIFFRAC.MEASUREMENT CENTER - DIFFRAC.LEPTOS - Automated Workflow Solution - Contour package for display of Wafer Map Results - WIBU Dongle for DIFFRAC.SUITE