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SCREEN / DNS / DAINIPPON SCREEN WS-820C
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    Key Item Details

    Condition:Used

    Operational Status:unknown

    Product ID:36802

    Wafer Sizes:Unknown

    Vintage:2012

    Description

    No description available

    Configuration

    (1 Cassette type) : KM-803-A Process: Solvent CHDR STRIP (40-90 CELCIUS) RINSE SPARE IPA IPA QDR FR SPIN DRYER

    Documents
    OEM Model Description

    High Throughput Batch Cleaning Systems Enable Flexible Line Configurations: WS-820C is for 200 mm wafers with carrier transfer processing.

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