Description
Batch Wafer ProcessingConfiguration
No ConfigurationOEM Model Description
The Santa Clara Plastics / SCP Evolution 200 (E200) is an oxide etch wet station used in the semiconductor industry. The E200® offers both traditional and innovative solutions to wet surface preparation. The E200® is GreenDry CI™ (Chemical Inject) capable of HF, HCl, or ozone inject for cleaning and silicon surface preparation with integrated rinse/dry. It has hydrophilic particle results of particle neutral @ 120nm and 90nm and hydrophobic particle results of < 5 particle adders @ 120nm and < 20 particle adders @ 90nm. The E200® is the industry’s first truly modular construction with individual stainless steel frame and rotomolded plenum for a leak-proof design. It is made of fire-safe materials and has slide mount components for manufacturability and serviceability.Documents
No documents
CATEGORY
Wet Benches - Auto
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119887
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SANTA CLARA PLASTICS / SCP
EVOLUTION 200 (E200)
CATEGORY
Wet Benches - Auto
Last Verified: Over 30 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
119887
Wafer Sizes:
8"/200mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Batch Wafer ProcessingConfiguration
No ConfigurationOEM Model Description
The Santa Clara Plastics / SCP Evolution 200 (E200) is an oxide etch wet station used in the semiconductor industry. The E200® offers both traditional and innovative solutions to wet surface preparation. The E200® is GreenDry CI™ (Chemical Inject) capable of HF, HCl, or ozone inject for cleaning and silicon surface preparation with integrated rinse/dry. It has hydrophilic particle results of particle neutral @ 120nm and 90nm and hydrophobic particle results of < 5 particle adders @ 120nm and < 20 particle adders @ 90nm. The E200® is the industry’s first truly modular construction with individual stainless steel frame and rotomolded plenum for a leak-proof design. It is made of fire-safe materials and has slide mount components for manufacturability and serviceability.Documents
No documents