Description
Single Wafer Cleaner Details AttachedConfiguration
COM-SU-2000 SC1 / SC2 / dHF / dHCI 4 Chambers 3 Load Ports Shield Plate Open Cassette BCR Reader EC 3 unit (room temperature) and heater for 2 chemical (65 degree) HDIW unit (KELK) Eflow CabinetOEM Model Description
Wafer size 150mm ~ 200mm Inherits High-end Single Wafer Cleaning Technology to Deliver Outstanding Cost Performance. SU-2000 is a single-wafer cleaning system for ultra-thin substrate wafers. When the footprint of the SU-2000 (four-chamber specification) is compared with that of our existing two-chamber MP-2000, it is just 14 percent larger. This represents a major space saving and means the SU-2000 can be used to replace the MP-2000.Documents
CATEGORY
Wet Benches - Auto
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
150158
Wafer Sizes:
8"/200mm
Vintage:
2025
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SCREEN / DNS / DAINIPPON SCREEN
SU-2000
CATEGORY
Wet Benches - Auto
Last Verified: 12 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
150158
Wafer Sizes:
8"/200mm
Vintage:
2025
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available