Description
SIGE Wet, ScrubberConfiguration
Frame, 5 ch, 2 baths,OEM Model Description
The FC-821L is a single-bath cleaning system that integrates our finest chemical circulation cleaning technologies, perfected in our renowned multi-bath Wet Stations. It is an unprecedentedly efficient system that incorporates a low-pressure dryer to prevent water mark generation during the drying processes. The FC-821L meets all the rigorous challenges of next-generation cleaning by realizing quarter-micron processing with accelerated throughput yet reduced chemical consumption. By decreasing cleaning units, as in the popular FS-820L, we can offer compact designs and radical space savings than previous multi-bath systems. Installing the FC-821L directly adjoining the next process equipment significantly slashes space demands in limited clean room environments. Moreover, the consequent minimized wafer transfer between processings greatly inhibits the generation of native oxides and other contamination.Documents
SCREEN / DNS / DAINIPPON SCREEN
FC-821L
Verified
CATEGORY
Wet Benches - Auto
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Crated
Product ID:
113973
Wafer Sizes:
8"/200mm
Vintage:
2020
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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SCREEN / DNS / DAINIPPON SCREEN
FC-821L
CATEGORY
Wet Benches - Auto
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled / Crated
Product ID:
113973
Wafer Sizes:
8"/200mm
Vintage:
2020
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available