MicroSense has a singular focus on precision measurement. Provide customers with state-of-the-art measurement performance products - precision capacitive sensors for high resolution, non-contact position sensing; vibrating sample magnetometers and MOKE systems for magnetic property measurement; and wafer metrology systems for accurately measuring wafer thickness and shape.

Single channel, 3U high Eurocard for rack mounting.

KLA / MICROSENSE

4800

The Model 6360 CD-HR Stamper Thickness Measurement System is a semi-automated thickness gauging platform and data analysis system for the measurement of optical media stampers. Patented non-contact capacitive sensors determine the stamper thickness without any damage to the stamper. A personal computer is provided to run the gauging platform, acquire measurement data and display results.

6360 CD-HR

ADE’s Model 6035 uses non-contact eddy-current probes to accurately measure Bulk Resistivity of wafers. This MicroSense system handles wafers up to 150mm in diameter, and is useful in the laboratory for materials research or on the production line for quality, process control, and yield analysis. 

6035

Replaced by Model 8810
The 3800 OEM gaging module is a non-contact capacitive dimensional gaging system designed for maximum flexibility combined with ease of use.  Capacitive transduction converts variations in a probe-to-target distance into an electrical signal.

3800

The Model 6810 high resolution capacitive sensor offers state-of-the art performance for position and displacement measurement. The 6810 is designed specifically for "high dynamic" measurement of high speed rotating or oscillating targets such as precision Hard Disk Drive spindle motors, precision air bearing spindles and mechanical bearing machine tool spindles.  Applications include run out measurement such as axial and radial NRRO (non-repeatable run out or asychronous error motion) which require resolution of 1 to 2 nm-rms or better.

The 6810 is electrically compatible “drop in” replacement for users who wish to upgrade from existing 5810 systems – no design changes are required.
 
The 6810 is ideal for use with our SpinCheck Metrology System – The 6810 is 100% compatible with existing and new SpinCheck systems. Existing SpinCheck customers can typically improve measurement resolution by 2X to 5X by upgrading to 6810 demodulators modules and 6000 series probes.

6810

The MicroSense model 4810 is a non-contact precision position sensor. The 4810 is optimized for short range displacement measurement applications that require best possible linearity and stability. 

Single channel, stand alone sensor with external low noise power supply

4810

The Model 6034 measures wafer Thickness, Total Thickness Variation (TTV), Flatness, Bow and Warp. This system incorporates a similar capacitive measurement technique as the 6033T and is typically used in quality control and wafer processing areas to measure wafers up to 200mm in diameter. 

6034

The MicroSense model 8810 is a non-contact precision position sensor. The 8810 is designed for best linearity and stability, with measurement bandwidth up to 20 kHz – ideal for servo system position feedback and fast tool servo applications.

8810

Single channel, 3U high Eurocard for rack mounting

8800

Single channel, low profile (no meter) stand alone sensor with external low noise power supply.

4805

5800

6033

The Model 6033T, using ADE’s patented capacitive measurement principle, measures wafers for Thickness and Total Thickness Variation (TVV). Whenever semiconductor wafer inspection is required, the MicroSense Model 6033T offers a low cost method of achieving fast, accurate measurements on wafers up to 150mm in diameter. 

6033T

The MicroSense Model 5810 is a single channel, non-contact precision capacitive displacement sensor. Designed for high dynamic applications, the Model 5810 provides high resolution with measurement bandwidth up to 100 kHz.

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

KLA / MICROSENSE

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4810

6810

3800

6034

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