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Description
Chemical Mechanical PolisherConfiguration
POWER: 208, 380, 460 Vac, 3 phase, 50/60 Hz DI WATER: Peak Flow: 12 gallons per minute (gpm) (45.4 I/m, Average Flow: 6 gpm (22.7 1/min), Pressure: 25 to 30 psi, minimum CHILLED WATER: Peak Flow: 5 gpm (18.9 l/min) COMPRESSED AIR: Peak Flow: 6 standard cubic feet per minute (SCFN) (170 SLM) NITROGEN: Peak Flow 10 SCFM (283 SLM) DIMENSIONS SPECIFICATION: Width: 207.62 in (5273.55 mm Depth: 131.74 in (3346.20 mm Height: 92.0 in (2336.8 mm Weight: Approximately 7500 Ibs. (3410 Kg)OEM Model Description
The IPEC 472 wafer polisher is a fully automated, precision tool for CMP polishing of semiconductor wafers used to achieve flatness, uniformity, and planarization on patterned/device wafers. The 472 features automatic wafer handling and is capable of two platen, two-step polishing processing to maximize wafer throughput capability and quality. Designed to planarize wafers from 100mm to 200mm, the 472 is ideally suited for materials polishing applications that require repeatability with operational and processing flexibility.Documents
Verified
CATEGORY
Wafer Polishing
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
19761
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
IPEC / WESTECH
AVANTI 472
CATEGORY
Wafer Polishing
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
19761
Wafer Sizes:
4"/100mm, 5"/125mm, 6"/150mm, 8"/200mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available