
Description
Equipment front-end moduleConfiguration
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM Model Description
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.Documents
No documents
CATEGORY
Wafer Handling
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153153
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BROOKS / PRI AUTOMATION
109752-199
CATEGORY
Wafer Handling
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
153153
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Equipment front-end moduleConfiguration
(Qty 2) Load ports Brooks robot part number: 121655 FIXLOAD 6" FabExpress Brooks robot controller part number: 105947 P/N: 701-0401-01ROEM Model Description
The Brooks Automation 109752-199 is the model designation for a 300mm Equipment Front End Module (EFEM), specifically utilized in the FabExpress family of atmospheric wafer transfer and cabinet automation systems.Documents
No documents