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Automated production bonding system for a wide range of fusion/molecular wafer bonding applications SOI wafers are a promising new basic material for the microelectronics industry to produce faster and higher-performance microelectronic devices. Wafer bonding, as one key enabling technology for the SOI wafer fabrication process, achieves high-quality single-crystal silicon films on insulating substrates. With the EVG850 SOI production bonding system, all essential steps for SOI bonding – from cleaning and alignment to pre-bonding and IR-inspection – are combined. Thus, the EVG850 assures a high-yield production process for void-free SOI wafers up to 300 mm sizes. Being the only production system built to operate in high-throughput, high-yield environments, the EVG850 has been established as the industry standard in the SOI wafer market.Documents
Verified
CATEGORY
Wafer Bonders
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
150756
Wafer Sizes:
12"/300mm
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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EVGroup (EVG)
EVG850
CATEGORY
Wafer Bonders
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Idle
Product ID:
150756
Wafer Sizes:
12"/300mm
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available