Overview

Technology: Plasma-assisted reactive magnetron -sputtering (PARMS/ PARMS+) Applications: MF sputtering (optional: RF, DC sputtering) MF sputtering Coating material: SiO2, Al2O3, Nb2O5, Ta2O5, HfO2, ZrO2, HfO2, Si3N4, ITO, Al, Ag, SiH Capacity: 12* pcs. at Ø 200 mm / 8”