Description
No descriptionConfiguration
FILM THICKNESS MEASUREMENTOEM Model Description
The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.Documents
No documents
Verified
CATEGORY
Thin Film / Film Thickness
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137346
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / THERMA-WAVE
OP-5340
CATEGORY
Thin Film / Film Thickness
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
137346
Wafer Sizes:
8"/200mm, 12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
FILM THICKNESS MEASUREMENTOEM Model Description
The THERMAWAVE OP 5340 metrology system is used for complex thin film thickness measurement on 150mm, 200mm, and 300mm wafers. The THERMAWAVE OP 5340 has 65nm IC Production Accuracy. The THERMAWAVE OP 5340 is capable of directly interfacing with automated material handling systems. OP-5300 Series has expanded OP-5200 series wafer measurement capability to 300 millimeters.Documents
No documents