Description
Metrology / inspection systemConfiguration
Main System Robot Handler (Qty 2) SMIF Factory Interface Process: THICKNESS Software Version: DOS CIM: SECSOEM Model Description
The Opti-Probe 5240 is a tool designed to meet thin film metrology requirements. It offers full spectrum Spectroscopic Ellipsometry to directly measure optical constants, Absolute Ellipsometry to accurately characterize your thinnest films.Documents
No documents
Verified
CATEGORY
Thin Film / Film Thickness
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147116
Wafer Sizes:
8"/200mm
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / THERMA-WAVE
OP-5240
CATEGORY
Thin Film / Film Thickness
Last Verified: 6 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147116
Wafer Sizes:
8"/200mm
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Metrology / inspection systemConfiguration
Main System Robot Handler (Qty 2) SMIF Factory Interface Process: THICKNESS Software Version: DOS CIM: SECSOEM Model Description
The Opti-Probe 5240 is a tool designed to meet thin film metrology requirements. It offers full spectrum Spectroscopic Ellipsometry to directly measure optical constants, Absolute Ellipsometry to accurately characterize your thinnest films.Documents
No documents