Description
Structure: Vapor deposition chamber, radical chamber, sputtering chamber Turbo molecular pump TMP-303LM <Vapor deposition chamber> Organic resistance heating x 10 points, metal zone x 4 points, resistance heating evaporation sources 2 boats/1 set, exhaust CRYO-U, Film controller CRTM-9000 (5 types for sensor organics, 2 types for metals), 2 constant current power supplies, high current power <radical chamber> O2 gas, RF200W <sputtering chamber> ITO sputtering, DC2kW, substrate heating possible, turbo molecule Pump TMP-803L G Box: VAC Model: VAC102282-OMNI-LAB 3φ200V 50/60Hz Approx. 59.4kVAConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
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Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
70795
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
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Refurbishment Services
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ULVAC
Mini-Lab
CATEGORY
Thermal Evaporators
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
70795
Wafer Sizes:
Unknown
Vintage:
2010
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Structure: Vapor deposition chamber, radical chamber, sputtering chamber Turbo molecular pump TMP-303LM <Vapor deposition chamber> Organic resistance heating x 10 points, metal zone x 4 points, resistance heating evaporation sources 2 boats/1 set, exhaust CRYO-U, Film controller CRTM-9000 (5 types for sensor organics, 2 types for metals), 2 constant current power supplies, high current power <radical chamber> O2 gas, RF200W <sputtering chamber> ITO sputtering, DC2kW, substrate heating possible, turbo molecule Pump TMP-803L G Box: VAC Model: VAC102282-OMNI-LAB 3φ200V 50/60Hz Approx. 59.4kVAConfiguration
No ConfigurationOEM Model Description
None ProvidedDocuments
No documents