Description
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Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEM Model Description
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DENTON VACUUM
DV 502C
Verified
CATEGORY
Thermal Evaporators
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
21629
Wafer Sizes:
Unknown
Vintage:
Unknown
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DENTON VACUUM
DV 502C
Verified
CATEGORY
Thermal Evaporators
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
21629
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEM Model Description
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Similar Listings
View AllNo Similar Listings