Description
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.Configuration
No ConfigurationOEM Model Description
Discontinued Mar. 2020Documents
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DISCO
DTU1531
CATEGORY
Support Equipment
Last Verified: 8 days ago
Key Item Details
Condition:
Used
Operational Status:
Deinstalled
Product ID:
153636
Wafer Sizes:
Unknown
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.Configuration
No ConfigurationOEM Model Description
Discontinued Mar. 2020Documents
No documents