Description
ScannerConfiguration
Exposure Light Source: ArF Excimer Laser Wavelength: 193 NA: 0.85 Resolution: 80nm Alignment Accuracy: 12nm Exposure Field: 26x33mm Reduction Ration: 1:4OEM Model Description
NSR-S307E (resolution ≦ 80 nm).Documents
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NIKON
NSR-S307E
CATEGORY
Steppers & Scanners
Last Verified: Today
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
145516
Wafer Sizes:
12"/300mm
Vintage:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available