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Description
No descriptionConfiguration
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM Model Description
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)Documents
No documents
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53557
Wafer Sizes:
8"/200mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-SF200
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
53557
Wafer Sizes:
8"/200mm
Vintage:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Laser system: KOMATSU Resolution: 0.18um Wafer loader type: type 3, NC Pre2 Reticle size: 6 inch Max expose field size: 26mm X 33mm Reticle library: Nikon Standard (9Slot) PPD: Yes Bar code reader: Yes Alignment system: LSA, FIA Inline: Left in-line Chamber type: S61OEM Model Description
Throughput: ≧ 110 wafers/hour (300 mm wafer) ≧ 120 wafers/hour (200 mm wafer)Documents
No documents