Description
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1． Reticle size and RL type information；SMIF-OHT 2． Whether have LSA/FIA/LIA function； FIA 3． WL size and wafer loader type information；WL type3 4． Wafer Cassette numbers；1unit 5． Wafer Inline position； from Inline 6． Wafer PRE-Align Type; NC pre2 7. SF140 current condition ? In production? Idle? up production 8． Any missing parts or damaged parts? No missing parts 2) Recent tool performance data of SF140（Power、uniformity、Dis、INC、Stepping、Focus、LSA-FiA OVL、Flatness 、Resolution etc.) FlatnessOEM Model Description
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).Documents
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NIKON
NSR-SF140
CATEGORY
Steppers & Scanners
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
147412
Wafer Sizes:
Unknown
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
1． Reticle size and RL type information；SMIF-OHT 2． Whether have LSA/FIA/LIA function； FIA 3． WL size and wafer loader type information；WL type3 4． Wafer Cassette numbers；1unit 5． Wafer Inline position； from Inline 6． Wafer PRE-Align Type; NC pre2 7. SF140 current condition ? In production? Idle? up production 8． Any missing parts or damaged parts? No missing parts 2) Recent tool performance data of SF140（Power、uniformity、Dis、INC、Stepping、Focus、LSA-FiA OVL、Flatness 、Resolution etc.) FlatnessOEM Model Description
i-line Steppers Throughput: ≧ 100 wafers/hour (300 mm wafer), ≧ 120 wafers/hour (200 mm wafer). NSR-SF140 (resolution ≦ 280 nm).Documents
No documents