Description

No description

Configuration

Details attached

OEM Model Description

NSR-SF130, a scan-field i-line stepper with high throughput and extremely low cost of ownership. The system makes use of leading-edge lens technology to achieve the same wide exposure field (26×33 mm) as DUV scanners, making it ideal for mix and match applications. The NSR-SF130, Nikon’s fifth new semiconductor systems announced in 2003, achieves a resolution of 280 nm or better and boasts a throughput of 120 wafers/hour for 300 mm wafers. The system combines superior performance with the lowest cost of ownership to help reduce semiconductor manufacturing costs.

Documents

NIKON STEPPER sf130.xlsx

NIKON

NSR-SF130

Verified

Steppers & Scanners

Last Verified: Over 30 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

136090

Wafer Sizes:

12"/300mm

Vintage:

2004

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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