
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The NSR-S206D features a lens with the world’s highest numerical aperture (N.A. 0.82), along with 248nmwavelength KrF excimer lasers. Incorporating a lens-based scanning system, this stepper enables mass production of cutting-edge devices with 110nm or better design rules using a KrF excimer laser. The NSR-S206D provides a high throughput of 88 or more 300mm wafers/hour, or 147 or more 200mm wafers/hourDocuments
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NIKON
NSR-S206D
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
127608
Wafer Sizes:
Unknown
Vintage:
2002
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
No ConfigurationOEM Model Description
The NSR-S206D features a lens with the world’s highest numerical aperture (N.A. 0.82), along with 248nmwavelength KrF excimer lasers. Incorporating a lens-based scanning system, this stepper enables mass production of cutting-edge devices with 110nm or better design rules using a KrF excimer laser. The NSR-S206D provides a high throughput of 88 or more 300mm wafers/hour, or 147 or more 200mm wafers/hourDocuments
No documents