Overview

The NSR-S206D features a lens with the world’s highest numerical aperture (N.A. 0.82), along with 248nmwavelength KrF excimer lasers. Incorporating a lens-based scanning system, this stepper enables mass production of cutting-edge devices with 110nm or better design rules using a KrF excimer laser. The NSR-S206D provides a high throughput of 88 or more 300mm wafers/hour, or 147 or more 200mm wafers/hour