Description
Lithography MachineConfiguration
Toolset: Nikon stepperOEM Model Description
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.Documents
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NIKON
NSR-2205i11C
Verified
CATEGORY
Steppers & Scanners
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
115940
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i11C
CATEGORY
Steppers & Scanners
Last Verified: 18 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
115940
Wafer Sizes:
6"/150mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Lithography MachineConfiguration
Toolset: Nikon stepperOEM Model Description
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.Documents
No documents