Description
Step and Repeat System 23.11.08 Converted from 6 to 8 inchConfiguration
Step and Repeat System 23.11.08 Converted from 6 to 8 inch Open VMS Altitude - Sea Level Resolution - 0.40 um Computer Type - Vax Station with Expansion unit Software - Reticle size - 6 Movable Microscopes - Yes Wafer size - 8 inch Notch Illuminator Type - 1.75 kW Shrinc - Shrinc 3 Moveable NA - Yes Reticle Libraries - 1 PPD - Yes Bar code reader - Yes Wafer loader indexers - 2 Wafer loader type Type - 2 Wafer Loader Prealignment 2 - Yes Wafer Loader In Line - Left FIA - Yes LSA - Yes Chip levelling - Yes Autococus - Yes VRA - Yes FC2 - Yes Ceramic 3 pin ring chuck - YesOEM Model Description
The NSR-2205i11C is equipped with a resolution of 450nm or better and features a numerical aperture (NA) of 0.57. It utilizes an i-line (365nm) exposure light source and has a reduction ratio of 1:5. The exposure field ranges from a 22mm square to 17.9(H) x 25.2(V)mm. The alignment accuracy, using the EGA method, is 70nm or better. The system comes with the LSA alignment system as standard and offers the optional FIA and LIA alignment systems.Documents
NIKON
NSR-2205i11C
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105383
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NIKON
NSR-2205i11C
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
105383
Wafer Sizes:
6"/150mm, 8"/200mm
Vintage:
1997
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available