Description
i-LINEConfiguration
STEPPEROEM Model Description
Resolution: ≦ 500 nm NA (Numerical Aperture): 0.37~0.28 (Variable) Reduction Ratio1:2 Field Size: 52 mm (max) x 56 mm (max) (Φ70.7 mm inside) Exposure Wavelength: i-line 365 nm Reticle Size: 6 inch Wafer Size: 200 mm (8 inch), 300 mm (12 inch) (Selection)Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83622
Wafer Sizes:
12"/300mm
Vintage:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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CANON
FPA-5510iX
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
83622
Wafer Sizes:
12"/300mm
Vintage:
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
i-LINEConfiguration
STEPPEROEM Model Description
Resolution: ≦ 500 nm NA (Numerical Aperture): 0.37~0.28 (Variable) Reduction Ratio1:2 Field Size: 52 mm (max) x 56 mm (max) (Φ70.7 mm inside) Exposure Wavelength: i-line 365 nm Reticle Size: 6 inch Wafer Size: 200 mm (8 inch), 300 mm (12 inch) (Selection)Documents
No documents