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6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CANON FPA-6000AS4
    Description
    System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged
    Configuration
    ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.
    OEM Model Description
    The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.
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    CANON

    FPA-6000AS4

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: 12 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Installed / Idle


    Product ID:

    115820


    Wafer Sizes:

    Unknown


    Vintage:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
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    CANON FPA-6000AS4

    CANON

    FPA-6000AS4

    Steppers & Scanners
    Vintage: 2004Condition: Used
    Last Verified12 days ago

    CANON

    FPA-6000AS4

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: 12 days ago
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/2f27d8c03f2e4b59843fc80f29252e0e_wrodel20241108144308_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/69204d2d7dba491b9ee41abdf4406a17_wrodel20241106141640_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/17c5164e312f49be9eca97b9a4cfa9fa_wrodel20241108143633_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b4a6e0fe64524ac8856c21c02ca70c51_wrodel20241106141449_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/8db3d6f6bc2a443eb01cf364ef345170_wrodel20241108143620_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/4439e8716b884bd7ad3701f256326f36_wrodel20241106141614_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b699e5b9d25349d18590553fccf53600_wrodel20241108143813_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/18b08a84d2d94f77bf2bbb1b7eb7aaaa_wrodel20241106141713_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/70d557521a134acc9625665a2e9f16a1_wrodel20241108143842_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/7f8aecb3441e4e65903d40b75c56b0d6_wrodel20241106141348_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/f13ded79f39c4706b370ec8580ba2507_wrodel20241108143851_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/37d0711384e6443696f51efd3dcb8228_wrodel20241106141813_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b122d3d2eab0439c935d083b55d6350d_wrodel20241108143825_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/a95f593ca5e642c99c5d2851be14ddb6_wrodel20241106141746_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/0d118e8de1c44087b410e6f1560a7c94_wrodel20241108143726_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/914e7dbad8f24ef9b7996cda554618cd_wrodel20241106141732_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b4ecf57b5b9640a6b151679ea6d14667_11_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/fc42e9f601f647f3b2387d061d99a52e_wrodel20241108144253_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/1da17323ac2a403db35dd8eda49a3a16_wrodel20241108144343_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/4e5cf8443f6f455eb68470df7e19f8d8_12_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/c0f936549a044e878b7bd9e1f59bac8f_wrodel20241108144409_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/e0e3d1551b9b4e90b73fe1548adfb369_13_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/775a0019b266444e9cbf3d432814d0a3_14_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/c33e80c1fd444f8b92ee45fe410b9e23_wrodel20241108144504_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/eca240ca4f364b0b9c5cc3ffda360560_wrodel20241108144319_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/3add25158d44441fa2d75ef06d9be2bf_15_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/84a1c10a6e5542cca2c4ac1862e796da_16_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/5803383810f14a01be17a964f50d0a47_wrodel20241108144333_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/861834bb71a34071bc563925c449e38b_17_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b7df74325700457287eacd58cb82deb4_wrodel20241108144359_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/352723c113fe4206b2bfab5f94488b82_18_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/8f15f462d61541d3850d7caed2ed85ce_51_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/f714f0893265490294613b81040f4259_wrodel20241106142025_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/cb46745e86364202b913712e575c8ffa_52_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/195959c2056048668e73fd588d102515_wrodel20241106142132_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/9651d26e7dbf4aefbaaf7a222ae4f37b_wrodel20241106142154_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/45f2de5382f94b0f99c4346251038ba3_53_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/6c16cb2895fd493ab577e9dbfb8aa1d9_wrodel20241106142229_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/f4b3fb17754c4f67834adfb488c657a3_54_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/9a54516f38d64d96960747537243c4c7_55_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/d087d53bb26848fc9abbee7dcaa36b15_wrodel20241106143602_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/033db2456fd8464da0b8aa27032afb09_56_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/5489627afede446491e31ff23205dba5_wrodel20241106141813_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/db7f4d2a2e934fd5ac8b484016684353_57_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/03a465a3e97f440a986231177e2a0c59_wrodel20241106141825_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/71566e30702b4c60aa3b779a3c5c2e60_58_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/8b9676f0139844389bdf72af8741f9d7_wrodel20241106141906_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/5a4708972f4c4b2b8df7546e2dd10773_wrodel20241106141919_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/48e54a2ba2bc4058a35157aefadd5f39_59_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/b854afce66234caca92bf7244b13d533_wrodel20241106141919_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/830a5ca42069424eb7f183eccc25b2d5_wrodel20241106142025_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/9edbbbeedc304b17bd9533896f0c8410_wrodel20241106142132_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/ef826db502ff4e6e8e132ee1d1f770cf_wrodel20241106142154_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/d85e5fbcdb6b4c879df2b9c15582e9dd_wrodel20241106142229_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/844a98f6c8124952926b1292f51d3a5e_wrodel20241106143602_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/63f739e55dc345b7a1ea495a2754d2c0_wrodel20241106141813_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/507b4d7e99064d6b9b8a8bf9b2bb60a7_wrodel20241106141825_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/c101d27a5499406f955253b27356b980_wrodel20241106141906_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/030f8dca95a84bcea42aa1d9ac19ff26_wrodel20241106150615_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/2bb79d8ca1374b9e9450e243678c12d7_wrodel20241106150704_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/6b8ec7a8d44248f0a440eb039311c58c_wrodel20241108143033_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/ded572056f004465905604ab919e4a59_wrodel20241108143022_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/0b854a51ccfc4c0797f39621583430dd_wrodel20241106143632_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/a894f3a22cfe4d3fbd614d92426ee751_wrodel20241106150629_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/ddfbe1328cc34e458a7ecfab91de413f_wrodel20241106143656_mw.jpg
    listing-photo-48804225836f4c49bca630e67df8a9be-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/53254/48804225836f4c49bca630e67df8a9be/6906173deaf349aa848ed3bcc2a9fe0f_wrodel20241106143707_mw.jpg
    Key Item Details

    Condition:

    Used


    Operational Status:

    Installed / Idle


    Product ID:

    115820


    Wafer Sizes:

    Unknown


    Vintage:

    2004


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged
    Configuration
    ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.
    OEM Model Description
    The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.
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