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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CANON FPA-3000i4
    Description
    No description
    Configuration
    No Configuration
    OEM Model Description
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
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    CANON

    FPA-3000i4

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: Yesterday

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    111318


    Wafer Sizes:

    Unknown


    Vintage:

    1996


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
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    Transaction Insured by Moov
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    CANON FPA-3000i4

    CANON

    FPA-3000i4

    Steppers & Scanners
    Vintage: 1995Condition: Used
    Last VerifiedYesterday

    CANON

    FPA-3000i4

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: Yesterday
    listing-photo-fbb710b658d947db9dd290c7731b9231-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    111318


    Wafer Sizes:

    Unknown


    Vintage:

    1996


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    No description
    Configuration
    No Configuration
    OEM Model Description
    The Canon FPA-3000 i4 is a stepper used in the semiconductor industry. It has a reticle size of 6" square with a thickness of 0.25" and is made of quartz material1. It can handle wafer sizes of 4" through 8" that are SEMI Standard, JEIDA, Notch/Flat. The Canon FPA-3000 i4 has a projection magnification of 1/5 X and a numerical aperture of .45 - .63. The field size is 22x22 17x26 and the exposure light is Kr F (365nm). The estimated throughput of the Canon FPA-3000 i4 is 59 wafers per hour for an 8" wafer with 60 shots and 22 mm field size. For a 6" wafer, it can handle up to 83 wafers per hour with 32 shots and 22 mm field size. The Canon FPA-3000 i4 has an alignment accuracy of less than 0.06 μm (mean + 3 σ). The Canon FPA-3000 i4 has a resolution of 0.35 μm.
    Documents

    No documents

    Similar Listings
    View All
    CANON FPA-3000i4

    CANON

    FPA-3000i4

    Steppers & ScannersVintage: 1995Condition: UsedLast Verified:Yesterday
    CANON FPA-3000i4

    CANON

    FPA-3000i4

    Steppers & ScannersVintage: 1996Condition: UsedLast Verified:Yesterday
    CANON FPA-3000i4

    CANON

    FPA-3000i4

    Steppers & ScannersVintage: 1995Condition: UsedLast Verified:Yesterday