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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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CANON FPA-2500i2
    Description
    CANON STEPPER
    Configuration
    5:1 exposure
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    CANON

    FPA-2500i2

    verified-listing-icon

    Verified

    CATEGORY
    Steppers & Scanners

    Last Verified: Over 60 days ago

    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    73054


    Wafer Sizes:

    Unknown


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
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    Available
    Similar Listings
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    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & Scanners
    Vintage: 1993Condition: Used
    Last VerifiedOver 60 days ago

    CANON

    FPA-2500i2

    verified-listing-icon
    Verified
    CATEGORY
    Steppers & Scanners
    Last Verified: Over 60 days ago
    listing-photo-20444c26dce748979d3877ec967f7655-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details

    Condition:

    Used


    Operational Status:

    Unknown


    Product ID:

    73054


    Wafer Sizes:

    Unknown


    Vintage:

    1994


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    CANON STEPPER
    Configuration
    5:1 exposure
    OEM Model Description
    The CANON FPA-2500i2 is a stepper system that can be used with a 6” reticle wafer size. It has a numerical aperture of 0.54 / 0.45 and an image field of 22 mm [(X)17mm x (Y)26mm]. The CANON FPA-2500i2 stepper has a printing wavelength of i-line (365 nm) and a resolution of 0.45 μm. It has an illumination lamp of 1.5 kW super-high-pressure mercury and an illumination uniformity of ≤ 1.2 %. It also has alignment modes of TTL Off-Axis He-Ne TV and TTL Off-Axis Broad Band TV with an alignment light source of He-Ne laser (633 nm) and Halogen lamp. Its alignment accuracy is ≤ 0.1 μm (mean + 3 σ) and its throughput is ≥ 52 wafers / hour (8”, 60 shot).
    Documents

    No documents

    Similar Listings
    View All
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago
    CANON FPA-2500i2

    CANON

    FPA-2500i2

    Steppers & ScannersVintage: 1993Condition: UsedLast Verified:Over 60 days ago