Description
Main Process: Photo Sub-Process: ARF-Scanner Details AttachedConfiguration
Software Version: 5.0.0 Laser Type: Excimer GT60A4-1 Lens Type: 1700i NA: 1.2 Lens Data (EMZQ): Current [nm] Spherical: 0.65 Coma: 1.18 Astigmatism: 0.53 3-foil: 0.43 (25->Z37): 1.88 Focus Range (Chuck 1/2) 28/18OEM Model Description
The TWINSCAN XT:1700Fi is a state-of-the-art, dual-stage immersion lithography tool, specifically engineered for high-volume 300-mm wafer production. It boasts a resolution of 50 nm and below, making it a powerhouse for intricate semiconductor manufacturing. It features a 1.2-NA in-line catadioptric lens, an illuminator with optimized polarization mode, and advanced stage technology. It meets overlay and focus requirements and achieves a throughput of 122 wafers per hour. The tool also includes an extended ultra-k1 package with various enhancements.Documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
145988
Wafer Sizes:
12"/300mm
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASML
TWINSCAN XT:1700Fi
CATEGORY
Steppers & Scanners
Last Verified: 5 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
145988
Wafer Sizes:
12"/300mm
Vintage:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available