Description
Asset Description - 365nm I-line Software Version - 4.1 CIM - secs Process - 65/130nmConfiguration
System Type Description Quantity Status Handler System Wfr handler OK Factory Interface FOUP 1 OK Options System Others Main System Body 1 OKOEM Model Description
The productivity enhancements in TWINSCAN C increase wafer output to over 110 wafers per hour for 300 mm wafers at real production conditions (109 exposures per wafer). The TWINSCAN C product family will be available on four systems: the AT:400C, AT:750C, AT:850C and AT:1150C.Documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
133490
Wafer Sizes:
12"/300mm
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
TWINSCAN AT:400C
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Installed / Down
Product ID:
133490
Wafer Sizes:
12"/300mm
Vintage:
2004
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available