Description
ILINE STEPPERConfiguration
No ConfigurationOEM Model Description
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.Documents
No documents
Verified
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133063
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ASML
PAS 5500/250C
CATEGORY
Steppers & Scanners
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
133063
Wafer Sizes:
8"/200mm
Vintage:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
ILINE STEPPERConfiguration
No ConfigurationOEM Model Description
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.Documents
No documents