Category193 nm Step and Scan
Micrascan VII is a 157 nm technology is an extension of optical lithography that offers smaller feature sizes (or line-widths) for smarter, more sophisticated chips. Today's optical lithography standard is 193 nm technology that, with its leading-edge resolution of 80 nanometers, can print approximately 3,000 features that can be stacked up against the side of a salt crystal. 157 nm lithography is targeted for use below 65 nm.
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