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LIBRA 120 plus
CategorySEM / TEM / FIB
The superior electron optical column design concept from the predecessor instrument with its digital control of all lenses was consistently redefined in the LIBRA® 120 PLUS. It incorporates the proven in-column OMEGA energy filter and the four lens Koehler condenser system. Further improvements were achieved with regard to lower aberration coefficients of the objective lens, new lens coils, stability of electronics, and an even more versatile and stable condenser and slit aperture. The schematic design and beam path with the energy slit aperture in place is shown to the right.
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