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    Key Item Details


    Operational Status:

    Product ID:87012

    Wafer Sizes:6"/150mm



    No description available


    - Complete system - 1 front side scrubber - 1 back side scrubber - 1 spin dry station - 1 reverse unit, includes NMS 1000T Mini-Bubble system - Di H2O filtration and pressurization system - Main system and Mini-Bubbler unit mounted in sturdy crane bases

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    OEM Model Description

    The double-side scrubber SS-W60A-AR responds to the strict processing needs for the next-generation processes with complete contamination control and the latest precision processing capacity. The body is compact allowing installation space to be greatly reduced. Attention has also been paid to the operability, maintenance and safety. The SS-W60A-AR applies to 6-inch wafers, and the SS-W80A-AR supports 8-inch wafers

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