The Heatpulse 8800 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambient. The system is built for the production environment.Process Chamber accommodates 125mm to 200mm wafers, with standard slip-free ring and wafer aligner.

Mattson Technology Inc. sold AG Associates rapid-thermal processing (RTP) product line to Metron Technology. Metron will assume exclusive ownership of the 4000 and 8000 series RTP product line and begin distribution of spare parts for the installed base from its service locations in Southeast Asia, Europe and the United States.


HEATPULSE 8800

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