Rapid Thermal Processor 
The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The system is built for the production environment.

Mattson Technology Inc. sold AG Associates rapid-thermal processing (RTP) product line to Metron Technology. Metron will assume exclusive ownership of the 4000 and 8000 series RTP product line and begin distribution of spare parts for the installed base from its service locations in Southeast Asia, Europe and the United States.


METRON / AG ASSOCIATES

HEATPULSE  8108

a44868c6-2222-4eda-bd80-071784aaf54e.jpg

7156d56f-8e28-4611-bd8c-eff04b304402.jpg

7f1f2d6f-6334-461a-94ae-0f8acba77031.jpg

99dc8455-bae6-48a1-be74-f1a4f07e64e2.jpg

4554ed6d-bfe1-4cc9-846d-87cdc06681ff.jpg

17FAFA29-F79F-4990-A17B-5D4744169751_1_201_a.jpeg

0B47FF4E-30AC-4188-99EF-9F681AD18007_1_201_a.jpeg

6730AEF2-350B-480D-8E0B-D977BFB63A0E.jpeg

87D4B032-3579-4204-AAC0-9D7707AFE397.jpeg

EB2E84F3-B673-4860-9C1C-FD956EC06369_1_201_a.jpeg

6208431B-2D46-4F40-BC94-0FFCA7F479EF.jpeg

BC27C242-1341-484F-95E2-FC16ABA8D12D.jpeg

B3E59ADF-82B8-46C7-A4F3-94EF4BDF14FD_1_201_a.jpeg

0477BA22-C074-4A48-AD65-45E9765AE0AC_1_201_a.jpeg

2808EAA3-409B-42B0-933D-B34309FA682F.jpeg

BB02823A-42CC-4A84-8D31-4096FCEC558F.jpeg

3E37C556-0803-4041-AF39-1BA55C7CA7A1.jpeg

B84E75ED-EDBD-48EA-8046-83BD2BDBD67B.jpeg

B868A8C4-E5BE-4F8C-9309-F0B5FBE0941C.jpeg

57106B47-73A4-43AF-8A00-BE807E58C02E.jpeg

18E36144-2F90-4865-A205-51537C344587_1_201_a.jpeg

DCC2A90B-F7A6-48FB-8286-0FD4EFA67489.jpeg

1432B6C0-DBDC-4638-AD50-4FFD7F122127.jpeg

42FAD73F-A164-40FF-A6D8-3B36E279D28B.jpeg

3E533595-DB80-4395-9EB0-4441913E3A1C_1_201_a.jpeg

9610E215-EF83-416A-9760-94008B210F8E.jpeg

9D531F9F-63E4-4187-A032-C38898FD82E7.jpeg

53C245C3-F4FC-48A6-BA53-5ED736115A41.jpeg

DFF35CCD-1327-486A-9C82-246DE75A920A.jpeg

3F748AB0-A049-423D-BBE5-7E781B7E72D2.jpeg

A8570964-D552-4641-B44D-0150BABE7C51.jpeg

892F3316-FE74-4B8C-B990-5986913AEDA0.jpeg

47B9D51B-7245-4337-B0D0-F062DA5FB032.jpeg

2042F20F-B3A1-4A51-9BFD-9887C0A5629B.jpeg

3147B115-2950-4667-98A9-650BD76D29B5.jpeg

0420506A-E80C-423F-B97E-A46A8C0BA117.jpeg

8289DF2D-A7F2-4441-884C-57277D32526A_1_201_a.jpeg

147A4DB7-B5D8-40EC-A32F-8E495A094B36_4_5005_c.jpeg

8D05FD6A-B879-48A5-91B4-AD1A744B21F1_4_5005_c.jpeg

2A14E8D8-CBF2-409C-9EF9-23E448006E32_4_5005_c.jpeg

01778C00-9433-4B8A-902F-60BCF8AF766E.jpeg

D1123519-5357-48E1-945A-B2B54A1A3B6B.jpeg

5328996D-4A18-4991-8D0A-A2129FCD8C8C.jpeg

AF7B6E82-9061-4BA3-BEB3-2578B891766F_4_5005_c.jpeg

205CB33B-C831-43E7-9415-E063A1A5FFEC.jpeg

B8C9BA56-F042-4D6F-8C7E-543C86BF7471.jpeg

81C87FC9-318B-423E-AFF2-61E8839CCB8D.jpeg

9C15A6D9-3F48-4D53-9AB4-E1F55AF3998A.jpeg

FEB3AC4E-0135-4846-A4A8-97F8DE22C222.jpeg

92E1095F-680A-4EA5-A30E-08A6D0319E6B.jpeg

C9E99444-8301-4B12-979C-4AB32A1A72CB.jpeg

C096B357-03E1-4164-98FB-49CB10B8C8A2_1_201_a.jpeg

F1FAE8EE-73B4-4398-A6DA-C0FDC8A06A2C_1_201_a.jpeg

FD880593-6AF8-4FBE-9BEF-8D6CDA6408F4.jpeg

A9C2C775-E5F5-4132-9302-0D6ECCDD0B44.jpeg

811A72FC-EA79-4D13-B6AC-E024400D26E2.jpeg

69A29C32-301E-4B73-A3F6-868C802A66C9.jpeg

9ABA9B40-BE3B-4A49-91EA-8D4C32857A52.jpeg

E2E77604-47DB-49E5-A62D-8A0A9C01C9F2_1_201_a.jpeg

D753455B-4C19-492F-B2E9-46E38705F9A5.jpeg

D2413CB1-2B63-4F68-9E54-70B37D4E88D4.jpeg

062E9D47-7774-4708-AD5F-4B69A865D15C_1_201_a.jpeg

2B6E9558-7964-497F-BCD5-27C3BEB8C8F6_1_201_a.jpeg

The AG Associates Heatpulse8108 rapid thermal anneal system contains a subsystem for each of the following:
• Electronics (including a dedicated microprocessor)
• Mass-flow-controlled gas handling
• Cooling
• ULPA filtration
• Mechanical assemblies
Software programs, called recipes, specify the details for each process. The AG Associates Heatpulse 8108 system includes a 3-1/2-inch floppy disk drive for process recipe storage. A three-axis industrial robot automates processing by transporting wafers into and out of the process chamber. It uses closed-loop feedback for precise motion control and accurate positioning.
To provide cold-wall processing, water is circulated through the process-chamber walls. The quartz isolation tube is cooled with nitrogen or compressed air.

AG Associates Heatpulse 8108 Rapid Thermal Anneal equipment APPLICATIONS:
The Heatpulse 8108 system is a versatile tool which can be useful for many applications, such as (but not limited to):
• Silicon dielectric growth
• Implant annealing
• Glass re-flow
• Silicide formation and annealing
• Nitridation of metals
• Contact alloying
• Oxygen donor annihilation
AG Associates Heatpulse 8108 Physical Dimensions

Width
Monitor-Fab-Wall configurations: 40 in. (102 cm)
Monitor-Side-Panel configurations: 60 in. (152 cm)
Depth 42 in. (107 cm)
Height 82 in. (208 cm)
Weight
Monitor-Fab-Wall configurations: 1800 lbs (816 kg);
Monitor-Side-Panel configurations: 1840 lbs (835 kg)
Shipping weight
Monitor-Fab-Wall configurations: 2000 lbs (907 kg);
Monitor-Side-Panel configurations: 2040 lbs (925 kg)

AG-Associates-Heatpulse-8108-Rapid-Thermal-Annealing-Equipment.jpg

AG Associates Heatpulse 8108.pdf

640FEB11-5D39-4A9B-863D-108D17B1B458_1_201_a.jpeg

A88F97EA-DA58-4E52-A995-EA3B73AF32ED_1_201_a.jpeg

HEATPULSE 8108

Category

Overview

Active Listings

Services

Top Listings

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108

List it with Moov and find the perfect buyer in no time at all.

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108

METRON / AG ASSOCIATES

HEATPULSE 8108