Description
-Software Version: 1.22.1.6C -CIM: E84, SECS/GEM, GEM300, Interface A -Process: ms-ANNEALConfiguration
Mattson MILLIOS HVM -Handler System Standard Automation / Software (1) -Factory Interface FOUP (2) -Options System 10ms Long Pulse Capability (1) -Options System Interface A (1) -Options System Software Emulator (1)OEM Model Description
The Millios is based on proprietary water-wall argon arc lamp technology. The system design monitors and controls wafer front-side and backside temperature in real time. The system has excellent wafer temperature control capabilities, including unique millisecond anneal pulse duration adjustment capability and integrated spike anneal-flash millisecond anneal process capability. It can meet technical requirements of millisecond anneal process and effectively manage wafer thermal stress to avoid wafer breakage issues at the same time. The Millios is the best technical solution for ultra-shallow-junction formation, high-k materials passivation and metal silicide formation processes in advanced transistor fabrication. It is also applicable for other materials surface anneal processes.Documents
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MATTSON
MILLIOS
Verified
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112997
Wafer Sizes:
12"/300mm
Vintage:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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MATTSON
MILLIOS
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
112997
Wafer Sizes:
12"/300mm
Vintage:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
-Software Version: 1.22.1.6C -CIM: E84, SECS/GEM, GEM300, Interface A -Process: ms-ANNEALConfiguration
Mattson MILLIOS HVM -Handler System Standard Automation / Software (1) -Factory Interface FOUP (2) -Options System 10ms Long Pulse Capability (1) -Options System Interface A (1) -Options System Software Emulator (1)OEM Model Description
The Millios is based on proprietary water-wall argon arc lamp technology. The system design monitors and controls wafer front-side and backside temperature in real time. The system has excellent wafer temperature control capabilities, including unique millisecond anneal pulse duration adjustment capability and integrated spike anneal-flash millisecond anneal process capability. It can meet technical requirements of millisecond anneal process and effectively manage wafer thermal stress to avoid wafer breakage issues at the same time. The Millios is the best technical solution for ultra-shallow-junction formation, high-k materials passivation and metal silicide formation processes in advanced transistor fabrication. It is also applicable for other materials surface anneal processes.Documents
No documents