Skip to main content
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo
6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
MATTSON / STEAG / AST HEATPULSE 2146
    Description
    Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    MATTSON / STEAG / AST

    HEATPULSE 2146

    verified-listing-icon

    Verified

    CATEGORY
    RTP/RTA

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    15979

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    MATTSON / STEAG / AST HEATPULSE 2146

    MATTSON / STEAG / AST

    HEATPULSE 2146

    RTP/RTA
    Vintage: 0Condition: Used
    Last VerifiedOver 60 days ago

    MATTSON / STEAG / AST

    HEATPULSE 2146

    verified-listing-icon
    Verified
    CATEGORY
    RTP/RTA
    Last Verified: Over 60 days ago
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/rHFItiLo8chPVzPQ_z9bpbkOZg1CFk0-8uZJJB--2sU_20190315_091731_f
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/t46ma_nYW5NV1EMDF5D36PHcbVxQxD1N_RXULzUHFws_20190315_091731_f
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/cItqhGpmNRCeocMqs-ugePjsPJVFM6BQyKiw898rWr8_20190315_091731_f
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/1AWlInUFsFa47_sp4mO_btAfII5ljxAbQl82CYjRfQQ_20190315_091731_f
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/Ero-bFE6dOwsjUPj-KJautudmLHWMjEuICxaUNQ4bvM_20190315_091731_f
    listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/dGuPTi_vZO9TVl3uT78zHcyd-Co8EbJFbi_o1GUvg6k_20190315_091731_f
    Key Item Details
    Condition:

    Used

    Operational Status:

    Unknown

    Product ID:

    15979

    Wafer Sizes:

    Unknown

    Vintage:

    Unknown

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications
    Configuration
    No Configuration
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    MATTSON / STEAG / AST HEATPULSE 2146

    MATTSON / STEAG / AST

    HEATPULSE 2146

    RTP/RTAVintage: 0Condition: UsedLast Verified:Over 60 days ago