Skip to main content
We value your privacy

We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. Read More

Moov logo
Shop All Categories
PhotolithographyIon ImplantationEtch/AsherDepositionThermal ProcessingMetrologyPCB / SMTPackagingInjection MoldingProbersLaserSolarSupport Equipment TestingCNCInspection Equipment Wet Processing / Wafer Cleaning BondersLapping, Polishing, Grinding MiscellaneousLab EquipmentCrystal & Ingot ProductionWafer Singulation
Moov Icon
MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
  • MATTSON / STEAG / AST HEATPULSE 2146
Description
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications
Configuration
No Configuration
OEM Model Description
None Provided
Documents

No documents

MATTSON / STEAG / AST

HEATPULSE 2146

verified-listing-icon

Verified

CATEGORY
RTP/RTA

Last Verified: Over 60 days ago

Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

15979

Wafer Sizes:

Unknown

Vintage:

Unknown

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Similar Listings
View All
MATTSON / STEAG / AST HEATPULSE 2146

MATTSON / STEAG / AST

HEATPULSE 2146

RTP/RTA
Vintage: 0Condition: Used
Last VerifiedOver 60 days ago

MATTSON / STEAG / AST

HEATPULSE 2146

verified-listing-icon
Verified
CATEGORY
RTP/RTA
Last Verified: Over 60 days ago
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/rHFItiLo8chPVzPQ_z9bpbkOZg1CFk0-8uZJJB--2sU_20190315_091731_f
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/t46ma_nYW5NV1EMDF5D36PHcbVxQxD1N_RXULzUHFws_20190315_091731_f
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/cItqhGpmNRCeocMqs-ugePjsPJVFM6BQyKiw898rWr8_20190315_091731_f
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/1AWlInUFsFa47_sp4mO_btAfII5ljxAbQl82CYjRfQQ_20190315_091731_f
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/Ero-bFE6dOwsjUPj-KJautudmLHWMjEuICxaUNQ4bvM_20190315_091731_f
listing-photo--eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/Ot4uSyt7j-OkIRBJeE4orTieeZmN71mOLX5X1zTe7fk/-eB1x_80ZG0XXbniVvDZUT-7VH9s1yyMjgjmtGdxXu4/dGuPTi_vZO9TVl3uT78zHcyd-Co8EbJFbi_o1GUvg6k_20190315_091731_f
Key Item Details
Condition:

Used

Operational Status:

Unknown

Product ID:

15979

Wafer Sizes:

Unknown

Vintage:

Unknown

Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Single Chamber RTP Rapid Thermal Annealing Oxide & Nitride Film Deposition Cassette to Cassette Handling of 4”-6” Wafers 2 Axis Robot for Transporting Wafers to Heating Chamber 400°C to 1300°C Temperature Range Programmable 0-600 sec Steady State Process Time 120 Wafers/Hour Null Cycle (Zero Processing Time) Wafer Cooldown Stage Full Range Dual Pyrometer SECS Communications
Configuration
No Configuration
OEM Model Description
None Provided
Documents

No documents

Similar Listings
View All
MATTSON / STEAG / AST HEATPULSE 2146

MATTSON / STEAG / AST

HEATPULSE 2146

RTP/RTAVintage: 0Condition: UsedLast Verified:Over 60 days ago