Description
AST SUPER HEAT SYSTEMConfiguration
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEM Model Description
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.Documents
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MATTSON / STEAG / AST
2800
Verified
CATEGORY
RTP/RTA
Last Verified: 22 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
111960
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
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MATTSON / STEAG / AST
2800
CATEGORY
RTP/RTA
Last Verified: 22 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
111960
Wafer Sizes:
8"/200mm
Vintage:
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
AST SUPER HEAT SYSTEMConfiguration
-Software Version: DOS 2.0 -CIM: GEM -Process: RTP -Handler System: PRI ALIGNER (1) OK -Options System: PRI ROBOT ATM307 (1) OKOEM Model Description
The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.Documents
No documents