The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.

A supplier of advanced process equipment used to manufacture semiconductors, announced the successful completion to the merger between Mattson Technology, the semiconductor equipment division of STEAG Electronic Systems AG and CFM Technologies, Inc. 

In March 1999, STEAG acquired AG Associates, Inc. and combined its operations with the former AST Elektronik, which it acquired in 1996, to form STEAG RTP Systems. AG Associates was the first company to introduce products utilizing rapid thermal processing technology.

MATTSON / STEAG / AST

2800

Process: Thermal Processes 
Rapid Thermal Annealing 
System does not start due to a PC problem. Some parts might be missing.

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Asset Description AST SUPER HEAT SYSTEM
Software Version Window NT
CIM GEM
Process AST SUPER HEAT SYSTEM

Asset Description AST SUPER HEAT SYSTEM
Software Version Window NT
CIM GEM
Process AST SUPER HEAT SYSTEM

System Type                 Description       Quantity
Handler System             ROBOT                1
Factory Interface           NONE
Options System
Handler System         PREALIGNER         1
Main System              MAIN TOOL         1
Handler System        INDEXER 2200       2
Others

Excluded Items List (Pumps, Chillers & Abatement are all excluded)


2800

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MATTSON / STEAG / AST

2800

MATTSON / STEAG / AST

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MATTSON / STEAG / AST

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MATTSON / STEAG / AST

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MATTSON / STEAG / AST

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MATTSON / STEAG / AST

2800

MATTSON / STEAG / AST

2800

MATTSON / STEAG / AST

2800