Description
Tool was custom designed and built by Kurt LeskerConfiguration
Key Features • Chamber accommodates 8” (200mm) wafers • Designed to be compatible with cluster tools. • Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr). • Main: Pfeiffer 790L/s Turbomolecular pump with VAT • Load lock: Pfeiffer 67 L/s turbo pump • Roughing pump: Edwards NXDS10I Mechanical scroll pump • Control software and interlocks • Automated heavy duty linear transfer arm • Multiple ports and windows • Multiple gas inlets • Large central port for induction or other feedthrough • High frequency induction heating power source available (Ambrell 6kW)OEM Model Description
None ProvidedDocuments
Verified
CATEGORY
RTP/RTA
Last Verified: Yesterday
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Uncrated
Product ID:
147197
Wafer Sizes:
8"/200mm
Vintage:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CUSTOM
CATEGORY
RTP/RTA
Last Verified: Yesterday
Key Item Details
Condition:
New
Operational Status:
Deinstalled / Uncrated
Product ID:
147197
Wafer Sizes:
8"/200mm
Vintage:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available