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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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TP-500XP

Overview

The Therma-Wave TP-XP Series is designed to provide high measurement precision for critical threshold voltage (Vt) implants as well as post-anneal monitoring of ultra-shallow junctions for source-drain extensions. The tool incorporates advancements in lasers, optics, and wafer stage technology to respond to advanced metrology needs and supports SECS protocol and I300I automation industry standards requirements. With a large installed base, including all major IC manufacturers, and award-winning customer support, the Therma-Probe® XP series is a solution for 90 nm and beyond.

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