Overview

The Therma-Wave TP-XP Series is designed to provide high measurement precision for critical threshold voltage (Vt) implants as well as post-anneal monitoring of ultra-shallow junctions for source-drain extensions. The tool incorporates advancements in lasers, optics, and wafer stage technology to respond to advanced metrology needs and supports SECS protocol and I300I automation industry standards requirements. With a large installed base, including all major IC manufacturers, and award-winning customer support, the Therma-Probe® XP series is a solution for 90 nm and beyond.