Description
Reticle InspectionConfiguration
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM Model Description
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HORIBA
PR-PD2
CATEGORY
Reticle / Mask Inspection
Last Verified: 3 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155084
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Reticle InspectionConfiguration
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM Model Description
None ProvidedDocuments
No documents