Description
Pellicle Mounting SystemConfiguration
· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Facilitates reticle transfer to toolbox unit for studs demount treatment. · Toolbox unit consists of; a top cover, four stud demount units (with ability to move along Y and Z axis), four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs demount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Control panel: Facilitates software interface to navigate through studs demount sequences (start/end process). · SRT-100 is a semi-automated tool, where an operator performs reticle movement to toolbox prior to studs demount treatment. Operator then sends demount command through control panel to initiate the process.OEM Model Description
Reticle / Photomask equipmentDocuments
No documents
ASML
RWT 100
CATEGORY
Reticle / Mask Inspection
Last Verified: 2 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
155085
Wafer Sizes:
12"/300mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
Pellicle Mounting SystemConfiguration
· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Facilitates reticle transfer to toolbox unit for studs demount treatment. · Toolbox unit consists of; a top cover, four stud demount units (with ability to move along Y and Z axis), four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs demount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Control panel: Facilitates software interface to navigate through studs demount sequences (start/end process). · SRT-100 is a semi-automated tool, where an operator performs reticle movement to toolbox prior to studs demount treatment. Operator then sends demount command through control panel to initiate the process.OEM Model Description
Reticle / Photomask equipmentDocuments
No documents