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KLA RS35
    Description
    Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
    Configuration
    *. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
    OEM Model Description
    None Provided
    Documents

    No documents

    KLA

    RS35

    verified-listing-icon

    Verified

    CATEGORY
    Resistivity / Four Point Probe

    Last Verified: Over 60 days ago

    Key Item Details
    Condition:

    Refurbished

    Operational Status:

    Unknown

    Product ID:

    66001

    Wafer Sizes:

    8"/200mm

    Vintage:

    1998

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Similar Listings
    View All
    KLA RS35

    KLA

    RS35

    Resistivity / Four Point Probe
    Vintage: 1998Condition: Refurbished
    Last VerifiedOver 60 days ago

    KLA

    RS35

    verified-listing-icon
    Verified
    CATEGORY
    Resistivity / Four Point Probe
    Last Verified: Over 60 days ago
    listing-photo-1991d9ffc107489d8d1d5ce04ce67711-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    Key Item Details
    Condition:

    Refurbished

    Operational Status:

    Unknown

    Product ID:

    66001

    Wafer Sizes:

    8"/200mm

    Vintage:

    1998

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    Description
    Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room
    Configuration
    *. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHg
    OEM Model Description
    None Provided
    Documents

    No documents

    Similar Listings
    View All
    KLA RS35

    KLA

    RS35

    Resistivity / Four Point ProbeVintage: 1998Condition: RefurbishedLast Verified:Over 60 days ago