Used ULVAC ENTRON-EX W300 for Sale | Moov

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ULVAC ENTRON-EX W300

Description

PVD (Physical Vapor Deposition) Asset HDD not included Multi-Chamber Sputtering System ENTRON-EX W300T Triple Gun Cathode Tool

Configuration

Software Version: Ver. 332-A2 System Power Rating: 3 Phase,AC200V,80A/102A/63A 50/60 Hz Loading Configuration: 3 Load Ports Chm Position F1 PVD Sputter ( 3C ) AR, N2 Chm Position F2 PVD Sputter ( 3C ) AR, N2 Chm Position F4 PVD Sputter ( 3C ) AR, N2 Chm Position B1/B2 Degas Chambers F1,F2,F4 - PVD Chambers ( 3C Sputter process ) B1/B2 - Degas Chambers (Remove moist layer ) System is not configured with substrate bias. System utilizes AE MDX 1K

OEM Model Description

None Provided

Documents

No documents

ULVAC

ENTRON-EX W300

verified-listing-icon

Verified

CATEGORY

Deposition

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

48141

Wafer Sizes:

12"/300mm

Vintage:

2011

Have Additional Questions?

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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Key Item Details

Condition:

Used

Operational Status:

Unknown

Product ID:

48141

Wafer Sizes:

12"/300mm

Vintage:

2011

Logistics Support

Available

Money Back Guarantee

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

Description

PVD (Physical Vapor Deposition) Asset HDD not included Multi-Chamber Sputtering System ENTRON-EX W300T Triple Gun Cathode Tool

Configuration

Software Version: Ver. 332-A2 System Power Rating: 3 Phase,AC200V,80A/102A/63A 50/60 Hz Loading Configuration: 3 Load Ports Chm Position F1 PVD Sputter ( 3C ) AR, N2 Chm Position F2 PVD Sputter ( 3C ) AR, N2 Chm Position F4 PVD Sputter ( 3C ) AR, N2 Chm Position B1/B2 Degas Chambers F1,F2,F4 - PVD Chambers ( 3C Sputter process ) B1/B2 - Degas Chambers (Remove moist layer ) System is not configured with substrate bias. System utilizes AE MDX 1K

OEM Model Description

None Provided

Documents

No documents

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