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ULVAC CC-400
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    Key Item Details

    Condition:Used

    Operational Status:

    Product ID:72036

    Wafer Sizes:Unknown

    Vintage:Unknown

    Description

    Plasma deposition table PECVD

    Configuration

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    OEM Model Description

    The CC-400 is a load-lock-type plasma CVD system that is part of the CC-Series (CC-200/400). It is a compact and easy-to-use system designed for both R&D and production. The system supports high-density plasma processes on 27.12MHz and can deposit SiH4 (SiO2, SiNx, SiON, a-Si) and TEOS (SiO2). It also supports chamber cleaning by CF4+O2 plasma, heater for low-temperature deposition of organic EL, and various substrate sizes. The CC-400 has special features and further applications in compound-related devices of LED, LD, high-speed devices, organic EL systems for R&D use, solar battery systems for R&D use, and MEMS.

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