PRODUCER III
Reactors / MOCVD
Created: October 11, 2022
Last Verified: Over 60 days ago
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Condition: As Is
Product ID: 64782
Wafer Sizes: 12"/300mm
Vintage: 2012
Missing/ Faulty Parts/ Accessories List attached
Fab Section Thin Film Asset Description CVD85x, underutilized at FAB8, used for old techs Software Version B4361_gB8.00_24 CIM E84, SECS/GEM, GEM300, Interface A Process TFM_U-LowK Dielectric Hardware Configuration (fab): Main System Producer SE PECVD, 3CHM BCHD 1 Handler System Standard Automation and Software 1 Factory Interface FOUP 2
CVD chipmaking processes, including low k, strain engineering, litho-enabling films, thermal films and high-temperature PECVD applications
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Reactors / MOCVD
Reactors / MOCVD
Reactors / MOCVD
Reactors / MOCVD