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Description
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Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM Model Description
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Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113066
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NOVELLUS / VARIAN
3190
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113066
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM Model Description
None ProvidedDocuments
No documents