Description
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Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM Model Description
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Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113066
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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NOVELLUS / VARIAN
3190
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
113066
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No descriptionConfiguration
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 PhaseOEM Model Description
None ProvidedDocuments
No documents