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NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
  • NOVELLUS / VARIAN 3190
Description
No description
Configuration
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 Phase
OEM Model Description
None Provided
Documents

No documents

CATEGORY
PVD / Sputtering

Last Verified: Over 60 days ago

Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

113066


Wafer Sizes:

4"/100mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

NOVELLUS / VARIAN

3190

verified-listing-icon
Verified
CATEGORY
PVD / Sputtering
Last Verified: Over 60 days ago
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Key Item Details

Condition:

Used


Operational Status:

Unknown


Product ID:

113066


Wafer Sizes:

4"/100mm


Vintage:

Unknown


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
Description
No description
Configuration
Varian 3190 retrofitted to 3290 with mini quantum mag sources Currently configured for 100mm wafers 3 Target mini-quantums RF Etch VIPS (Vacuum Isolated Processing Station) Residual Gas Analyzer Description: Single Wafer Vertical Sputter System Vacuum System: Cryo Pumped Load Lock Included: Yes Number of RF Etch Cathodes: 1 Substrate Heaters: Yes Residual Gas AnalyzerL: Yes DC Power Supply Output Power 12.00 kW DC RF Generator Rated Power Output 1000 Watts Matching Network: Yes Power Requirements: 480 V 22.0 A 60 Hz 3 Phase
OEM Model Description
None Provided
Documents

No documents