Description
PVD/Sputtering SystemConfiguration
Details Attached Target;AL-Si Process Module: DEP A Station: STATION 3 Primary Utility: WATER PURGE MODULE UTILITY MAP (PRESSURE SWITCHES): S1: NOT USED S2: NOT USED S3: MANOMETER SHUT-OFF S4: DIFF CIRCUIT S5: CHAMBER ROUGH S6: HIVAC S7: THROTTLE S8: GAS MANIFOLD S9: GAS 1 S10: GAS 2 (OPTION) S11: GAS 3 (OPTION) S12: CHAMBER VENT S13: PLATEN COOLING S14: RGA SHUT-OFF S15: NOT USED S16: ESC Ar B.P. PUMP (OPTION) S17: ESC Ar B.P. WAFER (OPTION) S18: ESC Ar B.P. SUPPLY (OPTION) S19: SHUTTER S20: WATER S21: WAFER LIFT S22: NOT USED PNEUMATIC LAYOUT: S1-S6: DOOR 1 - DOOR 6 S7-S9: RESERVOIR; MODULE PUMP; DIFF PUMPING S10-S13: CASS 1 (SLOW PUMP, FAST PUMP, SLOW VENT, FAST VENT) S14-S17: CASS 2 (SLOW PUMP, FAST PUMP, SLOW VENT, FAST VENT) S18-S27: CHAMBER VENT; SPARE S28: MODULE HI-VAC SUPPLY Sensor: COMPRESSED AIR SENSOROEM Model Description
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD.Documents
Verified
CATEGORY
PVD / Sputtering
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
111803
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
SIGMA 200
CATEGORY
PVD / Sputtering
Last Verified: 4 days ago
Key Item Details
Condition:
Used
Operational Status:
Unknown
Product ID:
111803
Wafer Sizes:
4"/100mm
Vintage:
Unknown
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available