PERKIN ELMER

4410

UPgraded-Perkin-Elmer-4400-with-4-cathodes-capability-768x579.jpg

Upgraded with Allwin21 PC controller

DC magnetron Sputter, RF Diode Sputter, RF magnetron Sputter
Maximum 4 of 8 inch cathode.
Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode
Perkin-Elmer 4400 Sputtering Deposition Equipment Delta Cathode

small sample to 6 inch wafer
1-2 gas lines with MFC
RF Etch
Bias function
Loadlock heating function
Chamber heating function (Occupy one cathode port).
Co-Sputter function
Reactive sputter function

PC controller
New PCBs
Touch screen monitor

4410

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PERKIN ELMER

4410

PERKIN ELMER

4410

PERKIN ELMER

4410

PERKIN ELMER

4410

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